We manufacture high-quality monolithic large-scale components made of high-performance ceramics for the semiconductor industry. These must of course be extraordinarily resistant, since this is critical for the components to withstand the extreme conditions in the manufacture of semiconductors. We meet this requirement by using ultra-pure raw materials, which makes it possible for the high-performance ceramics to withstand high temperatures, temperature differences, chemicals and the use of plasmas and ion beams. Our ceramic components for the semiconductor industry are in particular renowned for their durability over long periods of time, which facilitates efficient operation of processing equipment. In order to meet the special requirements of components for the semiconductor industry, we rely on engineering expertise, experience and top quality. In addition, we guarantee absolute precision through the use of our state-of-the-art machinery – right down to the micrometre range! This means that KYOCERA Fineceramics Precision GmbH can supply optimum technical ceramics for all segments of the semiconductor industry – for lithography, deposition (CVD + PVD), diffusion, rapid thermal processing (RTP), ion implantation and etching.
What advantages do our technical ceramics offer?
- Made from ultra-pure raw materials
- Extraordinary resistance
- Excellent lifetime
What do we offer? Versatile high-performance ceramics.
- Monolithic large-scale components according to customer specification
- Electrostatic chuck systems
- Chamber components
- Gas systems
- Handling of wafers
Monolithic large-scale components for the semiconductor industry
Monolithic large-scale components made of high-performance ceramics are outstandingly suitable for the semiconductor industry. The constant demand for larger components is on the rise due to the growing diameters of silicon wafers and increasingly complex machines. Our focus is quite clearly on solutions and products that are tailored to customer requirements. In order to make optimum use of the potential of our materials, we work closely with our customers – from development and the production of prototypes and production samples to getting the product ready for mass production. We would gladly also support you in developing your product according to your specific wishes. Our goal is to meet your individual requirements for the semiconductor industry to the highest possible degree. Our service portfolio includes small ceramic components as well as monolithic parts with dimensions of up to 1000 mm x 1000 mm x 650 mm. We look forward to showing you the diverse possibilities of our high-performance ceramics.