Wafer chucks

Application: Holding and support plates for Si wafers for various processes during chip production in the semiconductor industry

Material: StarCeram Si

Base material: Silicon carbide (SiSiC)

Sector: Semiconductor industry

Are you interested in wafer chucks, or do you have any other questions about this product?


  • Rigidity
  • Low thermal expansion
  • Low weight
  • Wafer chucks with a diameter of up to 520 mm

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