Wafer chucks
Application: Holding and support plates for Si wafers for various processes during chip production in the semiconductor industry
Material: StarCeram Si
Base material: Silicon carbide (SiSiC)
Sector: Semiconductor industry
Are you interested in wafer chucks, or do you have any other questions about this product?
Advantages:
- Rigidity
- Low thermal expansion
- Low weight
- Wafer chucks with a diameter of up to 520 mm
